Integrated antennas on Si, proton-implanted Si and Si-on-quartz
- 13 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 40.6.1-40.6.4
- https://doi.org/10.1109/iedm.2001.979659
Abstract
High performance antennas have been realized on proton-implanted Si with 10/sup 6/ /spl Omega/-cm resistivity. Sharp antenna resonance and low loss up to 20 GHz are observed indicating excellent antenna quality. In contrast, very poor antenna characteristics are found on conventional oxide-isolated Si because of the lossy substrate.Keywords
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