Fabrication of Small Linewidth Diffractive Optics for Use with Soft X-Rays
- 1 January 1984
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- High Resolution Electron Beam Fabrication Using STEMProceedings, annual meeting, Electron Microscopy Society of America, 1978
- Contribution to the contamination problem in transmission electron microscopyUltramicroscopy, 1978