Microstructure of high-purity Fe films deposited by the non-mass-separated ion beam deposition method
- 31 July 1998
- journal article
- Published by Elsevier in Materials Chemistry and Physics
- Vol. 54 (1-3) , 321-324
- https://doi.org/10.1016/s0254-0584(98)00034-0
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Improved ion beam deposition system with RF sputter-type ion sourceNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1997
- Formation of iron film by ion beam depositionSurface and Coatings Technology, 1994
- Superior Corrosion Resistance of Ion Beam Deposited Iron FilmJapanese Journal of Applied Physics, 1993
- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971