An auger analysis of substrate-layer interactions in the chemical vapor deposition and activated reactive evaporation of TiC
- 1 October 1978
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 54 (1) , 75-83
- https://doi.org/10.1016/0040-6090(78)90279-1
Abstract
No abstract availableKeywords
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