Si etching affected by ir laser irradiation
- 1 June 1985
- journal article
- research article
- Published by Springer Nature in Applied Physics A
- Vol. 37 (2) , 117-119
- https://doi.org/10.1007/bf00618861
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Localized laser etching of compound semiconductors in aqueous solutionApplied Physics Letters, 1982
- Laser enhanced etching in KOHApplied Physics Letters, 1982
- Laser chemical technique for rapid direct writing of surface relief in siliconApplied Physics Letters, 1981
- Multiple photon excited SF6 interaction with silicon surfacesThe Journal of Chemical Physics, 1981
- Infrared laser induced reaction of SF6 with silicon surfacesThe Journal of Chemical Physics, 1980