A simple optical device for generating square flat-top intensity irradiation from a gaussian laser beam
- 1 November 1983
- journal article
- Published by Elsevier in Optics Communications
- Vol. 48 (1) , 44-46
- https://doi.org/10.1016/0030-4018(83)90246-8
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Beam quality of A KrF laser pumped by an annular electron beamOptics Communications, 1982
- Deep uv submicron lithography by using a pulsed high-power excimer laserJournal of Applied Physics, 1982
- An annular electron beam for longitudinal electron beam pumped high power lasersApplied Physics Letters, 1982
- Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laserApplied Physics Letters, 1982
- Localized laser etching of compound semiconductors in aqueous solutionApplied Physics Letters, 1982
- Technique for generating focal-plane flattop laser-beam profilesReview of Scientific Instruments, 1982