Evaluation of the antimony concentration profile in p-n diffusion junctions by an anodization technique and sheet resistivity measurements
- 31 October 1978
- journal article
- Published by Elsevier in Surface Technology
- Vol. 7 (4) , 305-312
- https://doi.org/10.1016/0376-4583(78)90072-9
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Anodic Formation of Oxide Films on SiliconJournal of the Electrochemical Society, 1957