Organic conductors as electron beam resist materials
- 1 January 1982
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 40 (1) , 90-92
- https://doi.org/10.1063/1.92901
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- New high-resolution charge transfer x-ray and electron beam negative resistApplied Physics Letters, 1980
- The difference between metallic and insulating salts of tetracyanoquinodimethone (TCNQ): how to design an organic metalAccounts of Chemical Research, 1979
- Electron irradiation of polymers and its application to resists for electron-beam lithographyCritical Reviews in Solid State and Materials Sciences, 1979
- Optical properties of the radical cation tetrathiafulvalenium (TT) in its mixed-valence and monovalence halide saltsPhysical Review B, 1979
- The crystal chemistry of organic metals. Composition, structure, and stability in the tetrathiafulvalinium-halide systemsJournal of the American Chemical Society, 1977
- Optical properties of charge transfer salts of tetracyanoquinodimethane (TCNQ)Solid State Communications, 1975