Germanium implantation into substrates for integrated optics
- 1 April 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 86 (3-4) , 279-287
- https://doi.org/10.1016/0168-583x(94)95290-6
Abstract
No abstract availableThis publication has 27 references indexed in Scilit:
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