Ultra-High Vacuum Valve
- 1 July 1955
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 26 (7) , 654-656
- https://doi.org/10.1063/1.1715279
Abstract
An all-metal ultra-high vacuum valve is described. The valve has a continuously variable conductance from about 1 l/sec to less than 10−14 l/sec and presumably as small as desired. An equilibrium method of measuring small leakage conductances is described.Keywords
This publication has 4 references indexed in Scilit:
- New Developments in the Production and Measurement of Ultra High VacuumJournal of Applied Physics, 1953
- An All-Metal Vacuum ValveReview of Scientific Instruments, 1952
- Vacuum Valve for the Handling of Very Pure GasesReview of Scientific Instruments, 1951
- Über die Adsorptionszeit und ihre Messung durch StrömungsversucheAnnalen der Physik, 1930