Permeability Properties of Highly Resistive Fe-Al-O Films.

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Abstract
Fe-Al-O films with a nano-granular structure were fabricated by RF magnetron sputtering. The films exhibit good magnetic softness together with high electrical resistivity.However, they have relatively large deterioration of the initial permeability at high frequencies. In an attempt to explain this peculiar behavior, dispersion of magnetic anisotropy in the films was measured by biaxial Vibrating Sample Magnetometer (VSM), but a theoretical calculation taking account of this anisotropy dispersion resulted in poor agreement with the experiments. Other possibilities such as the existence of a weak ferromagnetic phase, which may dominate the initial permeability, or strong damping of the spin precession, which may occur in the nanogranular structure, were also investigated, but none explained the peculiar behavior of the permeability. The results of this investigation suggest that the dielectric property of the granular film should be studied as a possible cause of this peculiar behavior.

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