An investigation of air-grown yttrium oxide and experimental determination of the sputtering yield and the inelastic mean free path
- 1 August 1986
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 26 (2) , 196-210
- https://doi.org/10.1016/0169-4332(86)90005-x
Abstract
No abstract availableKeywords
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