Deep ultraviolet microscope
- 1 February 1990
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 29 (4) , 495-501
- https://doi.org/10.1364/ao.29.000495
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 2 references indexed in Scilit:
- High Resolution, Steep Profile, Resist PatternsBell System Technical Journal, 1979
- Interspecimen Comparison of the Refractive Index of Fused Silica*,†Journal of the Optical Society of America, 1965