Fabrication of Multilayers with Growth Controlled by Sequential Surface Chemical Reactions
- 1 December 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (12S)
- https://doi.org/10.1143/jjap.33.7086
Abstract
A multilayer of aluminum oxide and titanium oxide was fabricated with growth controlled by sequential surface chemical reactions of trimethylaluminum/hydrogen peroxide for the aluminum oxide layer, and tetrachlorotitanium/hydrogen peroxide for the titanium oxide layer. Evaluation of the multilayer using a transmission electron microscope and an X-ray diffractometer indicated that the 1.6 nm thickness of each layer equaled the design value, and the ratio (Δ2θ/2θ0) of the full width of the first peak to the center angle of the peak was close to the theoretical minimum.Keywords
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