Eddy current microscopy using a 77-K superconducting sensor

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Abstract
We have used a scanning magnetic flux microscope based on a high transition temperature YBa2Cu3O7 superconducting quantum interference device (SQUID) to produce magnetic images of eddy currents in patterned Cu thin films and 11–30‐μm‐thick Cu on printed circuit boards. The fields produced by the eddy currents are imaged with a spatial resolution of about 80 μm over a 100‐mm2 sample area. With the sample and SQUID at 77 K, the microscope uses typical probing fields of 80 nT and can obtain simultaneously eddy current and static magnetic field images. At probing frequencies of 26–100 kHz, the system achieves a field sensitivity of about 7 pT Hz−1/2.