TRIDYN simulation of target poisoning in reactive sputtering
- 1 January 2005
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 228 (1-4) , 193-197
- https://doi.org/10.1016/j.nimb.2004.10.044
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Dynamic Monte Carlo simulation for reactive sputtering of aluminiumNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2003
- Influence of oxygen addition on the target voltage during reactive sputtering of aluminiumPlasma Sources Science and Technology, 2001
- Numerical and experimental studies of the sputter yield amplification effectRadiation Effects and Defects in Solids, 1994
- Atom assisted sputtering yield amplificationJournal of Vacuum Science & Technology A, 1992
- Tridyn-binary collision simulation of atomic collisions and dynamic composition changes in solidsComputer Physics Communications, 1988
- Modeling of reactive sputtering of compound materialsJournal of Vacuum Science & Technology A, 1987
- Influence of the pumping speed on the hysteresis effect in the reactive sputtering of thin filmsVacuum, 1987
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980