Dynamic Monte Carlo simulation for reactive sputtering of aluminium
- 1 August 2003
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 207 (4) , 415-423
- https://doi.org/10.1016/s0168-583x(03)01120-0
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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