Self-consistent particle simulation of three-dimensional dc magnetron discharge
- 31 August 1996
- Vol. 47 (6-8) , 1013-1016
- https://doi.org/10.1016/0042-207x(96)00114-5
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- An ion-neutral species collision model for particle simulation of glow dischargeJournal of Physics D: Applied Physics, 1995
- Simple Method to Determine Collisional Event in Monte Carlo Simulation of Electron-Molecule CollisionJapanese Journal of Applied Physics, 1994
- Three-Dimensional Simulation of Target Erosion in DC Magnetron SputteringJapanese Journal of Applied Physics, 1994
- Computational Studies on the Shape and Control of Plasmas in Magnetron Sputtering SystemsJapanese Journal of Applied Physics, 1993
- Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCCIEEE Transactions on Plasma Science, 1991
- Model of energetic electron transport in magnetron dischargesJournal of Vacuum Science & Technology A, 1990
- Self-consistent model of a direct-current glow discharge: Treatment of fast electronsPhysical Review A, 1990