Finite-Element Simulation of Local Oxidation of Silicon
- 1 January 1985
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
- Vol. 4 (1) , 41-53
- https://doi.org/10.1109/tcad.1985.1270097
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
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