Imprint with sharp tip stamps
- 24 August 2001
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 57-58, 389-396
- https://doi.org/10.1016/s0167-9317(01)00445-2
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Fabrication of quantum point contacts by imprint lithography and transport studiesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2000
- Fabrication of metallic point contacts: A new approach for devices with a multilayer or a heterointerfaceJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1998
- Nano-compact disks with 400 Gbit/in2 storage density fabricated using nanoimprint lithography and read with proximal probeApplied Physics Letters, 1997
- Nanoscale silicon field effect transistors fabricated using imprint lithographyApplied Physics Letters, 1997
- A new fabrication process for metallic point contactsMicroelectronic Engineering, 1997
- Nanoimprint lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996
- Imprint Lithography with 25-Nanometer ResolutionScience, 1996
- Imprint of sub-25 nm vias and trenches in polymersApplied Physics Letters, 1995