Impurity Redistribution Studies on Laser-Formed Silicides
- 1 January 1982
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Dopant diffusion in tungsten silicideJournal of Applied Physics, 1982
- Low-temperature redistribution of As in Si during Pd2Si formationApplied Physics Letters, 1981
- Scaling a double-pulsed copper chloride laser to 10 mJJournal of Applied Physics, 1978