Obtaining the specific contact resistance from transmission line model measurements
- 1 May 1982
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 3 (5) , 111-113
- https://doi.org/10.1109/edl.1982.25502
Abstract
In characterizing ohmic contacts using the transmission line model, it is necessary to make a measurement referred to as the contact end resistance, as a result of modification to the sheet resistance under the contact. In this article we show that this contact end resistance and the consequent specific contact resistance can be deduced from simple resistance measurements carried out between contacts on a standard, transmission line model test pattern.Keywords
This publication has 4 references indexed in Scilit:
- Ohmic contacts to Si-implanted InPSolid-State Electronics, 1981
- Specific contact resistance using a circular transmission line modelSolid-State Electronics, 1980
- Contact Resistance in Diffused ResistorsJournal of the Electrochemical Society, 1970
- Contact resistance on diffused resistorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1969