Electroplated rf MEMS capacitive switches
- 7 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 GhzPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Characteristics of micromachined switches at microwave frequenciesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Self-consistent simulation and modelling of electrostatically deformed diaphragmsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micromechanical membrane switches for microwave applicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micromachined low-loss microwave switchesJournal of Microelectromechanical Systems, 1999
- Fabrication of micromechanical switches for routing radio frequency signalsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1996