Micromechanical membrane switches for microwave applications

19 November 2002

conference paper
Published by Institute of Electrical and Electronics Engineers (IEEE)

No. 0149645X,p. 91-94
https://doi.org/10.1109/mwsym.1995.406090

Abstract

This paper proposes the fabrication of low-cost, low-loss microwave switches using thin metal membranes actuated by electrostatic fields. Measurement of switch test structures and modeling indicates that these devices have a potential 1000 to 2000-GHz figure-of-merit. Various aspects of fabrication, design, performance, and application of these devices are discussed.

Keywords

MICROMECHANICAL DEVICES
BIOMEMBRANES
OPTICAL SWITCHES
ELECTRODES
CONTACTS
DRY ETCHING
MICROWAVE DEVICES
INSTRUMENTS
OPTICAL DEVICE FABRICATION
OPTICAL ARRAYS

This publication has 2 references indexed in Scilit:

Micromachined microwave actuator (MIMAC) technology-a new tuning approach for microwave integrated circuits
Published by Institute of Electrical and Electronics Engineers (IEEE) ,2002
Micromechanical Membrane Switches on Silicon
IBM Journal of Research and Development, 1979