Suppression and origin of soft ESD failures in a submicron CMOS process
- 31 October 1994
- journal article
- Published by Elsevier in Journal of Electrostatics
- Vol. 33 (3) , 313-325
- https://doi.org/10.1016/0304-3886(94)90037-x
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- ESD failure modes: characteristics mechanisms, and process influencesIEEE Transactions on Electron Devices, 1992
- Characterization and modeling of second breakdown in NMOST's for the extraction of ESD-related process and design parametersIEEE Transactions on Electron Devices, 1991