Micromachining of monocrystalline silicon and glass for chemical analysis systems A look into next century's technology or just a fashionable craze?
- 1 May 1991
- journal article
- product review
- Published by Elsevier in TrAC Trends in Analytical Chemistry
- Vol. 10 (5) , 144-149
- https://doi.org/10.1016/0165-9936(91)85116-9
Abstract
No abstract availableKeywords
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