Assessment of optical constants of multilayer thin films with columnar-structure-induced anisotropy
- 14 March 1995
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 28 (3) , 571-575
- https://doi.org/10.1088/0022-3727/28/3/019
Abstract
The reflectance and transmittance of a multilayer thin film assembly with columnar-structure-induced anisotropy were measured. A simple method based on circuit theory was applied to analyse the thin film assembly. Experiments were carried out on several SiO2 and TiO2 films deposited onto BK7 glass substrates and on TiO2 films deposited onto SiO2 underlayers. The refractive indices, orientation of columns, and thicknesses of these films were recovered from the measurements.Keywords
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