Neutron scattering measurements of interdiffusion in amorphous Si/Ge multilayers

Abstract
Multilayered amorphous Si/amorphous Ge films with a periodicity of 80 to 100 Å have been obtained using UHV evaporation techniques. The interdiffusion coefficient D of this system was determined by measuring the intensity of the neutron (000) forward scattering satellites arising from the modulation, as a function of annealing temperature and time. The temperature dependence of D in the range 620-710 K is described by D = 6.34 x 10-3 exp (- 2.35 eV/kT ) cm2 s-1