Properties of nickel thin films on polyimide substrata for HF bolometers
- 1 November 1993
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 4 (11) , 1244-1248
- https://doi.org/10.1088/0957-0233/4/11/011
Abstract
Nickel thin films, especially when grown on polyimide substrata by means of sputtering techniques, have proven to be the best basic components for the realization of high-frequency power sensors. However, some discrepancies exist in the values of the electrical resistivity and temperature coefficient used to evaluate the performances of the Ni thin film bolometers. Experimental work is presented concerning the study of the physical behaviour of a 10 nm Ni film with the aim of providing accurate measurements of the abovementioned parameters. The experimental data disagree slightly with Matthiessen's rule, but an explanation of this unexpected deviation has been found without questioning the validity of the rule.Keywords
This publication has 9 references indexed in Scilit:
- Effects of substrate temperature, deposition pressure, and thickness on the morphology of ultrathin platinum film on SiO2/Si substrateThin Solid Films, 1992
- Thin-film bolometer for high-frequency metrologySensors and Actuators A: Physical, 1992
- Thin-film power-density meter for millimeter wavelengthsIEEE Transactions on Antennas and Propagation, 1991
- A single-load microcalorimetric technique with newly designed X-band load for precise measurement of microwave powerIEEE Transactions on Instrumentation and Measurement, 1987
- High-performance thin-film barretter mount for power measurement in W-bandElectronics Letters, 1985
- Electrical properties of thin nickel filmsThin Solid Films, 1981
- A new self-balancing DC-substitution RF power meterIEEE Transactions on Instrumentation and Measurement, 1976
- Newly Developed Bolometer Mounts for the Short Millimeter Wave RegionIEEE Transactions on Instrumentation and Measurement, 1972
- Thin-Film Waveguide Bolometers for Multimode Power MeasurementIEEE Transactions on Microwave Theory and Techniques, 1964