Effects of substrate temperature, deposition pressure, and thickness on the morphology of ultrathin platinum film on SiO2/Si substrate
- 1 October 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 219 (1) , 257-265
- https://doi.org/10.1016/0040-6090(92)90754-y
Abstract
No abstract availableKeywords
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