Movable micromachined silicon plates with integrated position sensing
- 28 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 211-214
- https://doi.org/10.1016/0924-4247(90)85041-2
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Thermally excited silicon microactuatorsIEEE Transactions on Electron Devices, 1988
- Novel microstructures for the i n s i t u measurement of mechanical properties of thin filmsJournal of Applied Physics, 1987
- Microfabricated structures for the i n s i t u measurement of residual stress, Young’s modulus, and ultimate strain of thin filmsApplied Physics Letters, 1987
- Silicon Torsional Scanning MirrorIBM Journal of Research and Development, 1980
- Micromechanical Membrane Switches on SiliconIBM Journal of Research and Development, 1979
- Micromechanical light modulator array fabricated on siliconApplied Physics Letters, 1977