Ion-implantation and diffusion behaviour of boron in germanium
- 1 December 2001
- journal article
- Published by Elsevier in Physica B: Condensed Matter
- Vol. 308-310, 525-528
- https://doi.org/10.1016/s0921-4526(01)00752-9
Abstract
No abstract availableKeywords
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- Diffusion of Impurities in GermaniumPhysical Review B, 1954