Excimer Laser-Assisted Chemical Vapor Deposition of Metal-Oxide Thin Film from β-Diketone Complexes
- 1 January 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (1A) , L35
- https://doi.org/10.1143/jjap.30.l35
Abstract
The effects of excimer laser irradiation (KrF: 248 nm) on the CVD of single-source systems (Y(thd)3, Ba(thd)2, and Cu(thd)2, where (thd) represents 2,2,6,6-tetramethyl-3,5-heptanedionate), and double-source systems (Y-Ba, Ba-Cu, and Y-Cu) were investigated. In the single-source system, the laser irradiation promotes the crystallization and oxidation of the deposited oxides, but there is no remarkable change in the deposition rates. On the other hand, in the double-source systems (Ba-Cu and Y-Cu), the irradiation increases the deposition rates and the Cu reactivity with Ba and Y in the vapor phase, and also promotes the crystallization and the oxidation through the uptake of activated oxygen into the films during deposition.Keywords
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