Sputtering of metal targets under increased oxygen partial pressure
- 1 March 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 13 (1-3) , 343-347
- https://doi.org/10.1016/0168-583x(86)90524-0
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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