Silicon-processed microneedles
- 1 March 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 8 (1) , 78-84
- https://doi.org/10.1109/84.749406
Abstract
A combination of surface- and bulk-micromachining techniques is used to demonstrate the feasibility of fabricating microhypodermic needles. These microneedles, which may be built with on-board fluid pumps, have potential applications in the chemical and biomedical fields for localized chemical analysis, programmable drug-delivery systems, and very small, precise sampling of fluids. The microneedles are fabricated in 1, 3, and 6 mm lengths with fully enclosed channels formed of silicon nitride. The channels are 9 /spl mu/m in height and have one of two widths, 30 or 50 /spl mu/m. Access to the channels is provided at their shank and distal ends through 40-/spl mu/m square apertures in the overlying silicon nitride layer. The microneedles are found to be intact and undamaged following repetitive insertion into and removal from animal-muscle tissue (porterhouse steak).Keywords
This publication has 17 references indexed in Scilit:
- Electrical and optical characteristics of vacuum-sealed polysilicon microlampsIEEE Transactions on Electron Devices, 1992
- Silicon-processed overhanging microgripperJournal of Microelectromechanical Systems, 1992
- A micromachined electrohydrodynamic (EHD) pumpSensors and Actuators A: Physical, 1991
- Microtransport induced by ultrasonic Lamb wavesApplied Physics Letters, 1991
- Integrated micro flow control systemsSensors and Actuators A: Physical, 1990
- Micropump and sample-injector for integrated chemical analyzing systemsSensors and Actuators A: Physical, 1990
- Microfabricated electrohydrodynamic pumpsSensors and Actuators A: Physical, 1990
- A piezoelectric micropump based on micromachining of siliconSensors and Actuators, 1988
- A high-yield IC-compatible multichannel recording arrayIEEE Transactions on Electron Devices, 1985
- Fabrication of novel three-dimensional microstructures by the anisotropic etching ofIEEE Transactions on Electron Devices, 1978