Micropump and sample-injector for integrated chemical analyzing systems
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 189-192
- https://doi.org/10.1016/0924-4247(90)85036-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Normally closed microvalve and mircopump fabricated on a silicon waferSensors and Actuators, 1989
- Prototype miniature blood gas analyser fabricated on a silicon waferSensors and Actuators, 1988
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988