A thin film bolometer using porous silicon technology
- 1 May 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 43 (1-3) , 185-187
- https://doi.org/10.1016/0924-4247(93)00691-v
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Application of porous silicon as a sacrificial layerSensors and Actuators A: Physical, 1994
- Amorphous silicon carbide and its application in silicon micromachiningSensors and Actuators A: Physical, 1994
- Using porous silicon as a sacrificial layerJournal of Micromechanics and Microengineering, 1993
- Porous silicon formation mechanismsJournal of Applied Physics, 1992
- A thin-film bolometer for radiation thermometry at ambient temperatureSensors and Actuators A: Physical, 1990
- Heat transport from a chipIEEE Transactions on Electron Devices, 1990
- Multijunction thin-film radiation thermopile sensorsMeasurement, 1988
- A silicon-thermopile-based infrared sensing array for use in automated manufacturingIEEE Transactions on Electron Devices, 1986