Deposition error compensation for optical multilayer coatings II Experimental results—sputtering system
- 1 May 1993
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 32 (13) , 2351-2360
- https://doi.org/10.1364/ao.32.002351
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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