3D integration of refractive microoptical components by deep proton irradiation
- 1 March 1993
- journal article
- Published by IOP Publishing in Pure and Applied Optics: Journal of the European Optical Society Part A
- Vol. 2 (2) , 111-124
- https://doi.org/10.1088/0963-9659/2/2/004
Abstract
No abstract availableKeywords
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