A Study of the Ion Beam Intensity and Divergence Obtained from a Single Aperture Three Electrode Extraction System

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Abstract
Experimental results are given for the perveance and beam divergence of a single aperture three electrode extraction system using helium ions at energies between 10 and 30 keV. The aperture radii, the electrode thicknesses, and the spacings were varied and from the results a preferred design was obtained for use in a multiaperture array. The most critical parameter was the ratio (S) of the radius of the first aperture to the distance between the first and second electrodes, the highest current density being obtained at values of this ratio less than 0.5. The optimum beam divergence observed corresponded to a Gaussian beam profile with a width (ω) of ± 1.2° at 2 m from the source. The measured perveance at small values of S and at minimum ω lay between 75% and 90% of the value predicted on the basis of a simple model using the Langmuir‐Blodgett formula for the spherical diode.