A special grow discharge source of positive ions
- 31 July 1985
- Vol. 35 (7) , 271-275
- https://doi.org/10.1016/0042-207x(85)90600-1
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Measurement of the sputtering yield for Ar+ and Ar2+ ions on gold filmsThin Solid Films, 1982
- 1.14 Energy distribution of the ions produced by saddle field ion sourcesVacuum, 1977
- A glow discharge ion gun for etchingVacuum, 1973
- The operation of a glow discharge ion gun used for specimen thinningJournal of Physics E: Scientific Instruments, 1971
- Ion Energies at the Cathode of a Glow DischargePhysical Review B, 1963