Migration of interstitials in silicon
- 15 September 1984
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 30 (6) , 3460-3469
- https://doi.org/10.1103/physrevb.30.3460
Abstract
We calculate total configurational energies for interstitial aluminum and silicon in silicon. The calculations, based on the self-consistent Green's-function technique, are done for a selective migration path along the "empty" channel in crystalline silicon. Short- and long-range structural distortions are found to be sizable and strongly varying along the migration path. Carrier capture is possible along the migration path, resulting in a drastic dependence of the migration barrier on the nominal charge-state of the defect. For aluminum migration in -type silicon we find a barrier of eV, which in -type material can be lowered by eV due to carrier capture. Both numbers agree well with experiment. Assuming a similar migration path for interstitial silicon the calculated values are and (2.0±0.4) eV. In addition, the heat of tetrahedral formation of interstitial Si is evaluated to be eV.
Keywords
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