Study of atomic excitation in sputtering as a function of the projectile incidence angle
- 1 November 1983
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 28 (9) , 5011-5018
- https://doi.org/10.1103/physrevb.28.5011
Abstract
Solid targets of elemental beryllium, boron, magnesium, and gold have been bombarded with 80-keV ions. Intensities of photons emitted from sputtered particles have been measured as functions of the angle of incidence of the projectile. Generally, the excitation intensities increase with increasing angle of incidence, but a few levels show much stronger angular variations than the majority of levels do. The results are discussed. It is concluded that whereas the common increase in excitation is caused by the general increase in the number of swift, sputtered atoms, a few levels are in addition selectively excited through molecular-orbital electron-promotion processes taking place in binary collisions.
Keywords
This publication has 13 references indexed in Scilit:
- Study of atomic excitations in sputtering with the use of Mg, Al, Ca, and Cd targetsPhysical Review B, 1983
- Study of atomic excitations in sputtering with the use of Be, B, and C targetsPhysical Review B, 1983
- Secondary electron emission from gold bombarded with H+, H2+, H3+, He+, and HeH+Nuclear Instruments and Methods in Physics Research, 1982
- Atomic excitations in sputtering processesRadiation Effects, 1982
- A comparison of radiation from sputtered atoms with radiation from projectiles scattered on oxidized magnesium at varying angle of incidenceSurface Science, 1981
- Atomic excitations in sputtering studied with group two element targetsSurface Science, 1981
- Relative level excitation in ion-atom collisions as a function of the orbital-angular-momentum quantum numberPhysical Review A, 1977
- The excitation of inner shells in slow atomic collisionsReports on Progress in Physics, 1976
- Construction of a wien filter heavy ion acceleratorNuclear Instruments and Methods, 1974
- Extension of the Electron-Promotion Model to Asymmetric Atomic CollisionsPhysical Review A, 1972