Crystallization of an amorphous lead zirconate titanate thin film with a dense-plasma-focus device
- 1 March 1993
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 47 (9) , 4858-4862
- https://doi.org/10.1103/physrevb.47.4858
Abstract
The pulsed ion beam of highly energetic argon ions that is generated during the focus phase of the dense-plasma-focus (DPF) device is used to crystallize the as-grown rf-sputtered amorphous thin film of lead zirconate titanate (PZT). Many samples of PZT thin films of different thicknesses are exposed to the DPF device. The 0.9-μm-thick PZT thin film is crystallized to the desired rhombohedral phase. The scanning electron microscopy photograph of this film indicates a reasonably good surface quality.Keywords
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