Ferroelectric (Pb,La)(Zr,Ti)O3 epitaxial thin films on sapphire grown by rf-planar magnetron sputtering
- 15 July 1986
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 60 (2) , 736-741
- https://doi.org/10.1063/1.337423
Abstract
Ferroelectric (Pb,La)(Zr,Ti)O3 (PLZT) thin films have been epitaxially grown on the c plane of sapphire by rf-planar magnetron sputtering. The sputtering conditions were investigated to obtain epitaxial and transparent films. Dielectric, piezoelectric, and electro-optic properties of the films were measured. Piezoelectricity of the PLZT(28/0/100) film was confirmed and was as strong as that of BaTiO3. Excellent quadratic electro-optic effects for PLZT(28/0/100) and PLZT(9/65/35) films and a linear electro-optic effect for PLZT(21/0/100) film were observed at 0.633-μm wavelength. Epitaxial PLZT thin film on sapphire is presently the most promising material for new functional devices.This publication has 13 references indexed in Scilit:
- SAW Properties of PLZT Epitaxial Thin FilmsJapanese Journal of Applied Physics, 1985
- Electro-optic effects of (Pb, La)(Zr, Ti)O3 thin films prepared by rf planar magnetron sputteringApplied Physics Letters, 1983
- Dielectric Properties of PLZT Epitaxial Thin FilmsJapanese Journal of Applied Physics, 1983
- Epitaxial growth of ferroelectric PLZT thin film and their optical propertiesApplied Physics A, 1980
- Epitaxial growth of ferroelectric PLZT [(Pb, La)(Zr, Ti)O3] thin filmsJournal of Crystal Growth, 1978
- The ferroelectric phase transition of rare earth oxide substituted lead titanate ceramicsFerroelectrics, 1976
- Hot‐Pressed (Pb,La)(Zr,Ti)O3 Ferroelectric Ceramics for Electrooptic ApplicationsJournal of the American Ceramic Society, 1971
- Preparation of Thin BaTiO3 Films by dc Diode SputteringJournal of Applied Physics, 1970
- Analysis of Interdigital Surface Wave Transducers by Use of an Equivalent Circuit ModelIEEE Transactions on Microwave Theory and Techniques, 1969
- Elastic, Piezoelectric, and Dielectric Constants of Polarized Barium Titanate Ceramics and Some Applications of the Piezoelectric EquationsThe Journal of the Acoustical Society of America, 1956