Probing the influence of thin overlayers on the results of quantitative XPS analysis without reference samples
- 1 October 1980
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 2 (5) , 173-178
- https://doi.org/10.1002/sia.740020504
Abstract
In contrast to physical methods with large information depths, the results of quantitative XPS analysis are strongly influenced by oxide and/or contamination overlayers with a thickness of 1‐2 monolayers. A new method is introduced which allows the determination of a value d/(Λref cos ε)without the application of the variable take‐off angle technique. The significance of the results and their associated errors are discussed.Keywords
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