Stress Mapping Near Simulated Defects in Thin Film Wiring Using X-ray Microbeam Diffraction
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- X-ray diffraction determination of the effect of various passivations on stress in metal films and patterned linesJournal of Applied Physics, 1990
- Film-edge-induced stress in substratesJournal of Applied Physics, 1979