Film-edge-induced stress in substrates
- 1 July 1979
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 50 (7) , 4661-4666
- https://doi.org/10.1063/1.326575
Abstract
The problem of film-edge-induced stress in substrates has been analyzed self-consistently by allowing a distributed force in the film. The distributed force arises from the relaxation of the film strain, which is complementarily coupled to the substrate strain under the film force. The results are compared to those from a concentrated-edge-force approximation.This publication has 6 references indexed in Scilit:
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