A new micromachined silicon high-accuracy pressure sensor
- 1 January 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 46 (1-3) , 129-132
- https://doi.org/10.1016/0924-4247(94)00875-i
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Integrated magnetic field sensorSensors and Actuators A: Physical, 1991