Thermodynamics of Vapor Synthesis of AlN by Nitridation of Aluminum and Its Halides
- 1 April 1992
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 75 (4) , 920-928
- https://doi.org/10.1111/j.1151-2916.1992.tb04161.x
Abstract
A thermodynamic analysis for the vapor synthesis of AlN is presented. A thermodynamic equilibrium computer code and recent thermochemical tables are used to evaluate various reactant gases for their potential to produce high‐purity AlN at high yields. The Al/N/H/X/Y systems are examined, where X is any halide atom and Y is an inert gas. The effects of reactant ratio, temperature, and pressure on reactant conversion and product purity are estimated. Results from two systems are presented in the form of design diagrams, which represent the phases formed and the conversion achieved at various process conditions.Keywords
This publication has 28 references indexed in Scilit:
- Synthesis of AlN and TiN from Al and Al-Ti alloy by arc image heatingJournal of Materials Science Letters, 1990
- Particulate characteristics and deposition features of fine AIN powder synthesized by vapour-phase reactionJournal of Materials Science, 1989
- Aluminium nitride by carbothermal nitridationMaterials Science and Engineering: A, 1989
- Synthesis of fine AlN powder by vapour-phase reactionJournal of Materials Science Letters, 1988
- Continuous Synthesis and Properties of Fine AlN Powder by Floating Nitridation TechniqueJournal of the Ceramic Society of Japan, 1988
- Synthesis of AlN by the Nitridation of the Floating Al Particles in N2 GasJournal of the Ceramic Association, Japan, 1987
- Thermodynamic Analysis and Kinetic Implications of Chemical Vapor Deposition of Sic from Si‐C‐C1‐H Gas SystemsJournal of the American Ceramic Society, 1985
- Thermodynamic Calculations for the Chemical Vapor Deposition of Silicon NitrideJournal of the American Ceramic Society, 1983
- Properties of Aluminum Nitride Derived from AlCl[sub 3][middle dot]NH[sub 3]Journal of the Electrochemical Society, 1970
- Epitaxial growth of aluminum nitrideSolid-State Electronics, 1967